Inventor

KHUAT DUY LAURENT

NL5 patents

⚠️ This page may combine multiple inventors who share the name “KHUAT DUY LAURENT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KHUAT DUY LAURENT

2 patents

US8610898B2Dec 17, 2013

Self-referencing interferometer, alignment system, and lithographic apparatus

KHUAT DUY LAURENT18 citations86

US8570487B2Oct 29, 2013

Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate

KHUAT DUY LAURENT3 citations58

DEN BOEF ARIE JEFFREY

2 patents

US9081302B2Jul 14, 2015

Inspection apparatus and method, lithographic apparatus and lithographic processing cell

DEN BOEF ARIE JEFFREY3 citations60

US8675210B2Mar 18, 2014

Level sensor, lithographic apparatus, and substrate surface positioning method

DEN BOEF ARIE JEFFREY0 citations37

ASML NETHERLANDS BV

1 patent

US9488465B2Nov 8, 2016

Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatus

ASML NETHERLANDS BV8 citations80