Inventor · disambiguated record
Bryan A. Helmer
Also filed as: HELMER BRYAN · HELMER BRYAN A
2 granted patents·1 pending application·20 citations·filing 2001–2022
59Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0168US6540885B1Profile control of oxide trench features for dual damascene applicationsLAM RES CORP·Filed 2001·Granted Apr 1, 2003·14 cites·21 claims
- 0256US7311852B2Method of plasma etching low-k dielectric materialsLAM RES CORP·Filed 2001·Granted Dec 25, 2007·6 cites·23 claims
- 0347US2025079122A1Method for plasma etching a layer based on a iii-n materialCOMMISSARIAT ENERGIE ATOMIQUE·Filed 2022·Application pending·0 cites
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