Inventor · disambiguated record
Asuka Wakita
Also filed as: WAKITA ASUKA
3 granted patents·7 citations·filing 2015–2021
60Inventor score
Technology areasH10P
Files withSCREEN HOLDINGS CO LTD3
Top patents by PatentIndex Score
3 records- 0183US9984903B2Treatment cup cleaning method, substrate treatment method, and substrate treatment apparatusSCREEN HOLDINGS CO LTD·Filed 2017·Granted May 29, 2018·4 cites·1 claims
- 0279US12271830B2Learned model generating method, abnormality factor estimating device, substrate processing device, abnormality factor estimating method, learning method, learning device, and learning data generating methodSCREEN HOLDINGS CO LTD·Filed 2021·Granted Apr 8, 2025·1 cites·19 claims
- 0370US9768042B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2015·Granted Sep 19, 2017·2 cites·10 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →