Inventor · disambiguated record

Chung-Sheng Chang

Also filed as: CHANG CHUNG-SHENG

1 granted patent·0 citations·filing 2022–2022

4Inventor score

Technology areasC30B

Files withGLOBALWAFERS CO LTD1

Top patents by PatentIndex Score

1 record

0156US12006589B2Purification apparatus and method of purifying hot zone partsGLOBALWAFERS CO LTD·Filed 2022·Granted Jun 11, 2024·0 cites·11 claims

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