Inventor · disambiguated record

Hiroyuki Nii

Also filed as: NII HIROYUKI

1 granted patent·2 citations·filing 2015–2015

19Inventor score

Technology areasG03F

Files withJSR CORP1

Top patents by PatentIndex Score

1 record

0171US9354523B2Composition for resist pattern-refinement, and fine pattern-forming methodJSR CORP·Filed 2015·Granted May 31, 2016·2 cites·10 claims

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