Inventor · disambiguated record
Gregory M. Jursich
Also filed as: JURSICH GREGORY M
12 granted patents·5 pending applications·213 citations·filing 1990–2007
92Inventor score
Top patents by PatentIndex Score
17 records- 0191US7312165B2Codeposition of hafnium-germanium oxides on substrates used in or for semiconductor devicesJURSICH GREGORY M·Filed 2005·Granted Dec 25, 2007·34 cites·23 claims
- 0288US5672827AMethod for measuring the flow rate of a species contained in an exhaust gas stream of a combustion processAIR LIQUIDE AMERICAN·Filed 1995·Granted Sep 30, 1997·72 cites·2 claims
- 0378US7334708B2Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemicalAIR LIQUIDE·Filed 2002·Granted Feb 26, 2008·24 cites·20 claims
- 0476US7906094B2Method for producing a high purity trisilane product from the pyrolysis of disilaneAIR LIQUIDE·Filed 2007·Granted Mar 15, 2011·5 cites·17 claims
- 0572US5897847AMethod for extending the gas lifetime of excimer lasersAIR LIQUIDE AMERICAN·Filed 1993·Granted Apr 27, 1999·29 cites·10 claims
- 0659US7175696B2Method and apparatus for corrosive gas purificationAIR LIQUIDE AMERICA L P·Filed 2003·Granted Feb 13, 2007·7 cites·13 claims
- 0758US6543493B2Optical monitoring processes and apparatus for combined liquid level sensing and quality controlAIR LIQUIDE·Filed 2001·Granted Apr 8, 2003·13 cites·10 claims
- 0855US6581649B2Methods and apparatus for delivering high purity liquids with low vapor pressureL AIR LIQUIDE SA A DIRECTIORE·Filed 2001·Granted Jun 24, 2003·13 cites·21 claims
- 0954US7141500B2Methods for forming aluminum containing films utilizing amino aluminum precursorsAIR LIQUIDE AMERICAN·Filed 2004·Granted Nov 28, 2006·4 cites·22 claims
- 1054US6361750B2Systems for purification of boron trichlorideAIR LIQUIDE AMERICAN·Filed 2000·Granted Mar 26, 2002·2 cites·1 claims
- 1150US2007128103A1Method and Apparatus for Corrosive Gas PurificationZHOU DERONG·Filed 2007·Application pending·0 cites
- 1249US2007072770A1Adsorbent for Removing Water Vapor During Corrosive Gas Purification and Method for Preparing the AdsorbentZHOU DERONG·Filed 2006·Application pending·0 cites
- 1344US2006243207A1Fluid mixing and delivery systemJURSICH GREGORY M·Filed 2005·Application pending·0 cites
- 1442US2004038803A1Adsorbent for removing water vapor during corrosive gas purification and method for preparing the adsorbentFiled 2003·Application pending·0 cites
- 1535US2006272717A1Valve device for containing and preventing backflow of fluidsAGRAWAL RAJAT·Filed 2006·Application pending·0 cites
- 1633US6238636B1Process and systems for purification of boron trichlorideAIR LIQUIDE AMERICAN·Filed 1999·Granted May 29, 2001·4 cites·19 claims
- 1733US5063035AEnhanced performance of alumina for the removal of low-level fluorine from gas streamsAIR LIQUIDE AMERICAN·Filed 1990·Granted Nov 5, 1991·6 cites·7 claims
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