Inventor · disambiguated record

Jeffery S. Montgomery

Also filed as: MONTGOMERY JEFFERY S

1 granted patent·2 citations·filing 2013–2013

18Inventor score

Technology areasH10P

Files withVEECO INSTR INC1

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1 record

0164US10167571B2Wafer carrier having provisions for improving heating uniformity in chemical vapor deposition systemsVEECO INSTR INC·Filed 2013·Granted Jan 1, 2019·2 cites·20 claims

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