Inventor · disambiguated record

Shun-Jan Tao

Also filed as: TAO SHUN-JAN

1 granted patent·55 citations·filing 2001–2001

49Inventor score

Technology areasH01J

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0190US6590344B2Selectively controllable gas feed zones for a plasma reactorTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Jul 8, 2003·55 cites·19 claims

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