Inventor · disambiguated record

Kuo-En Yen

Also filed as: YEN KUO-EN

1 granted patent·21 citations·filing 2003–2003

40Inventor score

Technology areasY10T

Files withUNITED MICROELECTRONICS CORP1

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1 record

0168US7264676B2Plasma apparatus and method capable of adaptive impedance matchingUNITED MICROELECTRONICS CORP·Filed 2003·Granted Sep 4, 2007·21 cites·13 claims

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