Inventor · disambiguated record
Gil Hun Song
Also filed as: SONG GIL HUN
6 granted patents·4 pending applications·18 citations·filing 2008–2020
75Inventor score
Top patents by PatentIndex Score
10 records- 0187US9587880B2Apparatus and method for drying substrateSEMES CO LTD·Filed 2013·Granted Mar 7, 2017·9 cites·5 claims
- 0269US9275852B2Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2013·Granted Mar 1, 2016·2 cites·16 claims
- 0368US8282771B2Method of processing a substrate, spin unit for supplying processing materials to a substrate, and apparatus for processing a substrate having the sameSONG GIL-HUN·Filed 2008·Granted Oct 9, 2012·6 cites·13 claims
- 0465US10699918B2Chemical supply unit and apparatus for treating a substrateSEMES CO LTD·Filed 2017·Granted Jun 30, 2020·1 cites·7 claims
- 0563US11594421B2Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2020·Granted Feb 28, 2023·0 cites·15 claims
- 0651US2019115224A1Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2018·Application pending·0 cites
- 0736US2018337070A1Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2018·Application pending·0 cites
- 0834US2013081658A1Apparatus and method for treating substrateSONG GIL HUN·Filed 2012·Application pending·0 cites
- 0931US2015303036A1Substrate treatment apparatus including sealing member having atypical sectionSAMSUNG ELECTRONICS CO LTD·Filed 2015·Application pending·0 cites
- 1030US10232415B2Apparatus for treating substrateSEMES CO LTD·Filed 2015·Granted Mar 19, 2019·0 cites·11 claims
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