Inventor · disambiguated record
Robert G. Boehm, Jr.
Also filed as: BOEHM JR ROBERT G · BOEHM JR ROBERT GEORGE · BOEHM ROBERT · BOEHM ROBERT G
10 granted patents·3 pending applications·261 citations·filing 1997–2022
91Inventor score
Top patents by PatentIndex Score
13 records- 0197US6358118B1Field controlled polishing apparatus and methodLAM RES CORP·Filed 2000·Granted Mar 19, 2002·79 cites·36 claims
- 0293US7901026B2Drop analysis systemULVAC INC·Filed 2006·Granted Mar 8, 2011·21 cites·12 claims
- 0393US6612904B1Field controlled polishing apparatusLAM RES CORP·Filed 2001·Granted Sep 2, 2003·42 cites·20 claims
- 0478US6224461B1Method and apparatus for stabilizing the process temperature during chemical mechanical polishingLAM RES CORP·Filed 1999·Granted May 1, 2001·44 cites·22 claims
- 0577US8075080B2Camera-based automatic nozzle and substrate alignment systemALBERTALLI DAVID·Filed 2006·Granted Dec 13, 2011·8 cites·13 claims
- 0675US6186865B1Apparatus and method for performing end point detection on a linear planarization toolLAM RES CORP·Filed 1998·Granted Feb 13, 2001·38 cites·30 claims
- 0769US9542713B2Systems and methods for securing the manufacturing supply chainSTJOHNS MICHAEL C·Filed 2012·Granted Jan 10, 2017·2 cites·10 claims
- 0867US2023026748A1Systems, methods, storage media, and computing platforms for scanning items at the point of manufacturingPrintforia·Filed 2022·Application pending·0 cites
- 0965US6875091B2Method and apparatus for conditioning a polishing pad with sonic energyLAM RES CORP·Filed 2001·Granted Apr 5, 2005·12 cites·31 claims
- 1055US2007092627A1Tropicalizing agent, and methods for making and using the sameNESTEC SA·Filed 2004·Application pending·0 cites
- 1152US2005118327A1Tropicalizing agent, and methods for making and using the sameFiled 2003·Application pending·0 cites
- 1234US6119948AWater draw-off systemHAGE FITTINGS GMBH & CO KG·Filed 1997·Granted Sep 19, 2000·8 cites·6 claims
- 1333US6082781APipe connecting deviceHAGE FITTINGS GMBH & CO KG·Filed 1997·Granted Jul 4, 2000·7 cites·8 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →