Inventor · disambiguated record
Yueh-Lin Chou
Also filed as: CHOU YUEH-LIN
4 granted patents·39 citations·filing 1994–2005
74Inventor score
Technology areasG03F
Top patents by PatentIndex Score
4 records- 0160US6492069B1Method for forming an attenuated phase-shifting maskWORLDWIDE SEMICONDUCTOR MFG·Filed 2000·Granted Dec 10, 2002·11 cites·18 claims
- 0252US5478679AHalf-tone self-aligning phase shifting maskUNITED MICROELECTRONICS CORP·Filed 1994·Granted Dec 26, 1995·14 cites·20 claims
- 0349US6015641AReduction of optical proximity effect of bit line pattern in DRAM devicesWORLDWIDE SEMICONDUCTOR MANUFA·Filed 1998·Granted Jan 18, 2000·14 cites·12 claims
- 0443US7498105B2Method for checking phase shift angle of phase shift mask, lithography process and phase shift maskUNITED MICROELECTRONICS CORP·Filed 2005·Granted Mar 3, 2009·0 cites·16 claims
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