Inventor · disambiguated record
Lev Sakin
Also filed as: SAKIN LEV
6 granted patents·992 citations·filing 1992–2004
84Inventor score
Top patents by PatentIndex Score
6 records- 0197US6778257B2Imaging apparatusASML NETHERLANDS BV·Filed 2002·Granted Aug 17, 2004·953 cites·28 claims
- 0276US7023525B2Imaging apparatusASML NETHERLANDS BV·Filed 2004·Granted Apr 4, 2006·13 cites·39 claims
- 0371US5237969AIgnition system incorporating ultraviolet lightSAKIN LEV·Filed 1992·Granted Aug 24, 1993·21 cites·28 claims
- 0457US6741362B2Method, system, and computer program product for determining refractive index distributionASML HOLDING NV·Filed 2002·Granted May 25, 2004·2 cites·25 claims
- 0548US7242456B2System and method utilizing a lithography tool having modular illumination, pattern generator, and projection optics portionsASML HOLDINGS N V·Filed 2004·Granted Jul 10, 2007·2 cites·25 claims
- 0643US7405802B2Large field of view 2X magnification projection optical system for FPD manufactureASML HOLDING NV·Filed 2004·Granted Jul 29, 2008·1 cites·51 claims
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