Inventor · disambiguated record
Steve Biellak
Also filed as: BIELLAK STEVE
3 granted patents·50 citations·filing 2001–2005
72Inventor score
Files withKLA TENCOR TECH CORP3
Top patents by PatentIndex Score
3 records- 0186US7218392B2Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illuminationKLA TENCOR TECH CORP·Filed 2005·Granted May 15, 2007·11 cites·12 claims
- 0285US6956644B2Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illuminationKLA TENCOR TECH CORP·Filed 2001·Granted Oct 18, 2005·34 cites·75 claims
- 0364US6577389B2System and methods for inspection of transparent mask substratesKLA TENCOR TECH CORP·Filed 2001·Granted Jun 10, 2003·5 cites·47 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →