Inventor · disambiguated record

Jiaozeng Zheng

Also filed as: ZHENG JIAOZENG

3 granted patents·4 citations·filing 2016–2017

52Inventor score

Technology areasH10P

Files withSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD3

Top patents by PatentIndex Score

3 records

0178US10276417B2Pre-alignment device and method for waferSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2016·Granted Apr 30, 2019·4 cites·9 claims
0226US10782614B2Edge exposure device and methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Sep 22, 2020·0 cites·10 claims
0321US10416578B2Substrate pre-alignment methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2016·Granted Sep 17, 2019·0 cites·8 claims

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