Inventor · disambiguated record
Koji Kaise
Also filed as: KAISE KOJI
3 granted patents·88 citations·filing 1995–2005
74Inventor score
Technology areasG03F
Files withNIKON CORP3
Top patents by PatentIndex Score
3 records- 0184US7667829B2Optical property measurement apparatus and optical property measurement method, exposure apparatus and exposure method, and device manufacturing methodNIKON CORP·Filed 2005·Granted Feb 23, 2010·8 cites·26 claims
- 0278US6296977B1Method for the measurement of aberration of optical projection systemNIKON CORP·Filed 1999·Granted Oct 2, 2001·55 cites·27 claims
- 0365US5666205AMeasuring method and exposure apparatusNIKON CORP·Filed 1995·Granted Sep 9, 1997·25 cites·15 claims
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