Inventor · disambiguated record
Terry C. Tompkins
Also filed as: TOMPKINS TERRY C
3 granted patents·66 citations·filing 1982–1985
73Inventor score
Files withIBM3
Top patents by PatentIndex Score
3 records- 0185US4397937APositive resist compositionsIBM·Filed 1982·Granted Aug 9, 1983·38 cites·12 claims
- 0284US4522911ADeep ultra-violet lithographic resists with diazohomotetramic acid compoundsIBM·Filed 1983·Granted Jun 11, 1985·16 cites·7 claims
- 0356US4601969AHigh contrast, high resolution deep ultraviolet lithographic resist composition with diazo carbonyl compound having alpha phosphoryl substitutionIBM·Filed 1985·Granted Jul 22, 1986·12 cites·10 claims
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