Inventor · disambiguated record
Kimon Rybnicek
Also filed as: RYBNICEK KIMON
6 granted patents·99 citations·filing 2001–2008
84Inventor score
Top patents by PatentIndex Score
6 records- 0190US7528691B2Dual substrate electrostatic MEMS switch with hermetic seal and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted May 5, 2009·32 cites·20 claims
- 0286US7675162B2Interconnect structure using through wafer vias and method of fabricationINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted Mar 9, 2010·17 cites·24 claims
- 0385US7233048B2MEMS device trench plating process and apparatus for through hole viasINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted Jun 19, 2007·17 cites·19 claims
- 0484US7864006B2MEMS plate switch and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2008·Granted Jan 4, 2011·15 cites·25 claims
- 0582US7785913B2System and method for forming moveable features on a composite substrateINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted Aug 31, 2010·11 cites·10 claims
- 0660US6801681B2Optical switch with low-inertia micromirrorOPTICAL COATING LABORATORY INC·Filed 2001·Granted Oct 5, 2004·7 cites·23 claims
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