Inventor · disambiguated record
Tamihiro Kobayashi
Also filed as: KOBAYASHI TAMIHIRO
4 granted patents·4 pending applications·525 citations·filing 2005–2024
73Inventor score
Top patents by PatentIndex Score
8 records- 0196US7690881B2Substrate-processing apparatus with buffer mechanism and substrate-transferring apparatusASM JAPAN·Filed 2006·Granted Apr 6, 2010·523 cites·15 claims
- 0270US10867819B2Vacuum processing apparatus, vacuum processing system and vacuum processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Dec 15, 2020·1 cites·10 claims
- 0364US7799134B2Shower plate having projections and plasma CVD apparatus using sameASM JAPAN·Filed 2005·Granted Sep 21, 2010·1 cites·13 claims
- 0456US2024347321A1Processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0551US2023253223A1Substrate processing apparatus and method for correcting positional displacementTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0648US12094694B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Sep 17, 2024·0 cites·11 claims
- 0746US2010147396A1Multiple-Substrate Transfer Apparatus and Multiple-Substrate Processing ApparatusASM JAPAN·Filed 2008·Application pending·0 cites
- 0843US2025046645A1Substrate treatment device, substrate treatment system, and method for aligning placement tableTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →