Inventor · disambiguated record
Simon De Groot
Also filed as: DE GROOT SIMON
6 granted patents·135 citations·filing 2001–2018
83Inventor score
Top patents by PatentIndex Score
6 records- 0190US7626684B2Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatusASML NETHERLANDS BV·Filed 2008·Granted Dec 1, 2009·14 cites·23 claims
- 0290US6563564B2Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured therebyASM LITHOGRAPHY BV·Filed 2001·Granted May 13, 2003·58 cites·22 claims
- 0388US7262831B2Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatusASML NETHERLANDS BV·Filed 2004·Granted Aug 28, 2007·38 cites·20 claims
- 0484US7403264B2Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatusASML NETHERLANDS BV·Filed 2004·Granted Jul 22, 2008·24 cites·12 claims
- 0565US11880314B1Microcontroller for driving an external deviceDIALOG SEMICONDUCTOR BV·Filed 2018·Granted Jan 23, 2024·1 cites·15 claims
- 0646US7889316B2Method for patterning a radiation beam, patterning device for patterning a radiation beamASML NETHERLANDS BV·Filed 2006·Granted Feb 15, 2011·0 cites·19 claims
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