Inventor · disambiguated record
Katsuko Higashino
Also filed as: HIGASHINO KATSUKO
2 granted patents·2 pending applications·4 citations·filing 2011–2016
40Inventor score
Top patents by PatentIndex Score
4 records- 0177US8815751B2Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2012·Granted Aug 26, 2014·4 cites·22 claims
- 0242US9396929B2Method of manufacturing a semiconductor device, substrate processing apparatus and recording mediumHITACHI INT ELECTRIC INC·Filed 2013·Granted Jul 19, 2016·0 cites·15 claims
- 0341US2013078376A1Metal nitride containing film deposition using combination of amino-metal and halogenated metal precursorsHIGASHINO KATSUKO·Filed 2011·Application pending·0 cites
- 0432US2016314962A1Cyclic organoaminosilane precursors for forming silicon-containing films and methods of using the sameAIR LIQUIDE AMERICAN·Filed 2016·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →