Inventor · disambiguated record
Ilya Pokidov
Also filed as: POKIDOV ILYA
12 granted patents·6 pending applications·37 citations·filing 2006–2025
87Inventor score
Top patents by PatentIndex Score
18 records- 0191US7915597B2Extraction electrode system for high current ion implanterAXCELIS TECH INC·Filed 2008·Granted Mar 29, 2011·19 cites·20 claims
- 0288US11956885B2Method and apparatus for impedance matching in a power delivery system for remote plasma generationMKS INSTR INC·Filed 2021·Granted Apr 9, 2024·3 cites·23 claims
- 0385US10940635B2Method and apparatus for processing dielectric materials using microwave energyMKS INSTR INC·Filed 2018·Granted Mar 9, 2021·2 cites·19 claims
- 0485US10071521B2Method and apparatus for processing dielectric materials using microwave energyMKS INSTR INC·Filed 2015·Granted Sep 11, 2018·2 cites·18 claims
- 0576US9653266B2Microwave plasma applicator with improved power uniformityMKS INSTR INC·Filed 2015·Granted May 16, 2017·3 cites·51 claims
- 0674US11019715B2Plasma source having a dielectric plasma chamber with improved plasma resistanceMKS INSTR INC·Filed 2018·Granted May 25, 2021·1 cites·27 claims
- 0773US7435971B2Ion sourceAXCELIS TECH INC·Filed 2006·Granted Oct 14, 2008·7 cites·17 claims
- 0871US12289820B2Method and apparatus for impedance matching in a power delivery system for remote plasma generationMKS INSTR INC·Filed 2024·Granted Apr 29, 2025·0 cites·20 claims
- 0969US12075554B2Plasma source having a dielectric plasma chamber with improved plasma resistanceMKS INSTR INC·Filed 2021·Granted Aug 27, 2024·0 cites·21 claims
- 1064US2018233333A1Toroidal plasma abatement apparatus and methodMKS INSTR INC·Filed 2018·Application pending·0 cites
- 1163US9991098B2Toroidal plasma abatement apparatus and methodMKS INSTR INC·Filed 2017·Granted Jun 5, 2018·0 cites·9 claims
- 1263US2025308841A1Dopant delivery system to ion source using induction heatingAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 1362US12207385B2Method and apparatus for plasma ignition in toroidal plasma sourcesMKS INSTR INC·Filed 2023·Granted Jan 21, 2025·0 cites·20 claims
- 1459US9630142B2Toroidal plasma abatement apparatus and methodMKS INSTR INC·Filed 2014·Granted Apr 25, 2017·0 cites·9 claims
- 1556US2024312772A1Apparatus and method for current sensing using embedded electrodesMKS INSTR INC·Filed 2023·Application pending·0 cites
- 1648US2022243333A1Microwave System for Microwave-Assisted Surface Chemistry Annealing of ALD Processes Utilizing Microwave Radiation EnergyMKS INSTR INC·Filed 2022·Application pending·0 cites
- 1741US2015279626A1Microwave plasma applicator with improved power uniformityMKS INSTR INC·Filed 2014·Application pending·0 cites
- 1838US2013146225A1Gas injector apparatus for plasma applicatorCHEN XING·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →