Inventor · disambiguated record
Cristian Siladie
Also filed as: Siladie Cristian
4 granted patents·2 pending applications·19 citations·filing 2017–2022
71Inventor score
Files withLAM RES CORP6
Top patents by PatentIndex Score
6 records- 0191US10651015B2Variable depth edge ring for etch uniformity controlLAM RES CORP·Filed 2017·Granted May 12, 2020·7 cites·10 claims
- 0289US10825659B2Substrate processing chamber including multiple gas injection points and dual injectorLAM RES CORP·Filed 2017·Granted Nov 3, 2020·8 cites·13 claims
- 0383US10302553B2Gas exhaust by-product measurement systemLAM RES CORP·Filed 2017·Granted May 28, 2019·4 cites·16 claims
- 0467US11342163B2Variable depth edge ring for etch uniformity controlLAM RES CORP·Filed 2020·Granted May 24, 2022·0 cites·10 claims
- 0554US2024404804A1Reference Box for Direct-Drive Radiofrequency Power SupplyLAM RES CORP·Filed 2022·Application pending·0 cites
- 0654US2024395519A1Metrology Enclosure Including Spectral Reflectometry System for Plasma Processing System Using Direct-Drive Radiofrequency Power SupplyLAM RES CORP·Filed 2022·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →