Inventor · disambiguated record
Mary Cavanaugh
Also filed as: CAVANAUGH MARY
5 granted patents·34 citations·filing 2015–2015
80Inventor score
Technology areasH10P
Files withCABOT MICROELECTRONICS CORP5
Top patents by PatentIndex Score
5 records- 0193US9422456B2Colloidal silica chemical-mechanical polishing compositionCABOT MICROELECTRONICS CORP·Filed 2015·Granted Aug 23, 2016·9 cites·44 claims
- 0292US9499721B2Colloidal silica chemical-mechanical polishing compositionCABOT MICROELECTRONICS CORP·Filed 2015·Granted Nov 22, 2016·8 cites·46 claims
- 0392US9422457B2Colloidal silica chemical-mechanical polishing concentrateCABOT MICROELECTRONICS CORP·Filed 2015·Granted Aug 23, 2016·7 cites·29 claims
- 0485US10124464B2Corrosion inhibitors and related compositions and methodsCABOT MICROELECTRONICS CORP·Filed 2015·Granted Nov 13, 2018·6 cites·4 claims
- 0585US9803106B2Methods for fabricating a chemical-mechanical polishing compositionCABOT MICROELECTRONICS CORP·Filed 2015·Granted Oct 31, 2017·4 cites·20 claims
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