Inventor · disambiguated record
Tatsuhiro Mizukami
Also filed as: MIZUKAMI TATSUHIRO
5 granted patents·1 pending application·113 citations·filing 2005–2011
77Inventor score
Top patents by PatentIndex Score
6 records- 0195US8668836B2Plasma processing device and method of monitoring plasma discharge state in plasma processing deviceMIZUKAMI TATSUHIRO·Filed 2008·Granted Mar 11, 2014·99 cites·1 claims
- 0281US8237367B2Plasma treatment apparatus and plasma treatment methodNONOMURA MASARU·Filed 2008·Granted Aug 7, 2012·8 cites·3 claims
- 0370US8585862B2Plasma processing device and plasma discharge state monitoring deviceMIZUKAMI TATSUHIRO·Filed 2008·Granted Nov 19, 2013·4 cites·9 claims
- 0465US9073385B2Plasma processing method for substratesOKITA SHOGO·Filed 2011·Granted Jul 7, 2015·2 cites·8 claims
- 0549US8956499B2Plasma processing deviceMIZUKAMI TATSUHIRO·Filed 2008·Granted Feb 17, 2015·0 cites·5 claims
- 0637US2005266618A1Plasma processing method and method for fabricating electronic component module using the sameNONOMURA MASARU·Filed 2005·Application pending·0 cites
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