Inventor · disambiguated record
Tatsuo Enami
Also filed as: ENAMI TATSUO
7 granted patents·1 pending application·58 citations·filing 1999–2014
84Inventor score
Top patents by PatentIndex Score
8 records- 0174US7984539B2Chamber replacing methodGIGAPHOTON INC·Filed 2007·Granted Jul 26, 2011·3 cites·14 claims
- 0271US7196796B2Wavelength detecting apparatus, laser apparatus, and wavelength detecting methodGIGAPHOTON INC·Filed 2003·Granted Mar 27, 2007·10 cites·4 claims
- 0362US6636297B2Vacuum ultraviolet laser wavelength measuring apparatusGIGAPHOTON INC·Filed 2001·Granted Oct 21, 2003·9 cites·7 claims
- 0459US6819699B1Arf excimer laser device, scanning type exposure device and ultraviolet laser deviceKOMATSU MFG CO LTD·Filed 2000·Granted Nov 16, 2004·5 cites·6 claims
- 0555US2014328364A1Laser apparatusGIGAPHOTON INC·Filed 2014·Application pending·0 cites
- 0651US6243163B1Wavelength detectorKOMATSU MFG CO LTD·Filed 1999·Granted Jun 5, 2001·18 cites·14 claims
- 0750US8813329B2Chamber replacing methodFUJIMOTO JUNICHI·Filed 2011·Granted Aug 26, 2014·0 cites·17 claims
- 0846US6337872B1Once through fan for excimer laser apparatusKOMATSU MFG CO LTD·Filed 1999·Granted Jan 8, 2002·13 cites·7 claims
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