Inventor · disambiguated record
Fumika Yoshida
Also filed as: YOSHIDA FUMIKA
7 granted patents·20 citations·filing 2001–2013
80Inventor score
Top patents by PatentIndex Score
7 records- 0189US8610095B2Extreme ultraviolet light source deviceYABU TAKAYUKI·Filed 2010·Granted Dec 17, 2013·12 cites·13 claims
- 0270US8503499B2Gas discharge chamberNAGAI SHINJI·Filed 2010·Granted Aug 6, 2013·2 cites·6 claims
- 0370US8165181B2Polarization purity control device and gas laser apparatus provided with the sameNAGAI SHINJI·Filed 2009·Granted Apr 24, 2012·2 cites·6 claims
- 0466US8902948B2Polarization purity control device and gas laser apparatus provided with the sameGIGAPHOTON INC·Filed 2013·Granted Dec 2, 2014·1 cites·1 claims
- 0565US8891574B2Polarization purity control device and gas laser apparatus provided with the sameNAGAI SHINJI·Filed 2012·Granted Nov 18, 2014·1 cites·6 claims
- 0665US8855167B2Gas discharge chamberGIGAPHOTON INC·Filed 2013·Granted Oct 7, 2014·1 cites·1 claims
- 0745US6627843B2Casing for laser device, production method and cleaning method of the sameKOMATSU MFG CO LTD·Filed 2001·Granted Sep 30, 2003·1 cites·8 claims
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