Inventor · disambiguated record
Michael Hagg
Also filed as: HAGG MICHAEL
2 granted patents·0 citations·filing 2021–2022
23Inventor score
Files withZEISS CARL SMT GMBH2
Top patents by PatentIndex Score
2 records- 0153US11550225B2EUV radiation source, insert for an EUV radiation source and insert for an insert for an EUV radiation sourceZEISS CARL SMT GMBH·Filed 2021·Granted Jan 10, 2023·0 cites·13 claims
- 0243US12292690B2Insert for a source chamber of an EUV radiation sourceZEISS CARL SMT GMBH·Filed 2022·Granted May 6, 2025·0 cites·20 claims
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