Inventor · disambiguated record
Michael Carl Drymon
Also filed as: DRYMON MICHAEL · DRYMON MICHAEL CARL
2 granted patents·2 pending applications·92 citations·filing 2015–2022
63Inventor score
Files withLAM RES CORP4
Top patents by PatentIndex Score
4 records- 0194US9620376B2Self limiting lateral atomic layer etchLAM RES CORP·Filed 2015·Granted Apr 11, 2017·90 cites·16 claims
- 0274US10714354B2Self limiting lateral atomic layer etchLAM RES CORP·Filed 2017·Granted Jul 14, 2020·2 cites·16 claims
- 0354US2024404804A1Reference Box for Direct-Drive Radiofrequency Power SupplyLAM RES CORP·Filed 2022·Application pending·0 cites
- 0454US2024395519A1Metrology Enclosure Including Spectral Reflectometry System for Plasma Processing System Using Direct-Drive Radiofrequency Power SupplyLAM RES CORP·Filed 2022·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →