Inventor · disambiguated record
Linda Braly
Also filed as: BRALY LINDA · BRALY LINDA B
6 granted patents·145 citations·filing 2001–2012
84Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0196US7303999B1Multi-step method for etching strain gate recessesLAM RES CORP·Filed 2006·Granted Dec 4, 2007·95 cites·24 claims
- 0282US8901004B2Plasma etch method to reduce micro-loadingKAMP TOM·Filed 2010·Granted Dec 2, 2014·11 cites·18 claims
- 0379US7018780B2Methods for controlling and reducing profile variation in photoresist trimmingLAM RES CORP·Filed 2003·Granted Mar 28, 2006·24 cites·22 claims
- 0471US8671878B2Profile and CD uniformity control by plasma oxidation treatmentLAM RES CORP·Filed 2012·Granted Mar 18, 2014·2 cites·15 claims
- 0570US8298949B2Profile and CD uniformity control by plasma oxidation treatmentZHONG QINGHUA·Filed 2009·Granted Oct 30, 2012·3 cites·13 claims
- 0664US7204934B1Method for planarization etch with in-situ monitoring by interferometry prior to recess etchLAM RES CORP·Filed 2001·Granted Apr 17, 2007·10 cites·23 claims
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