Inventor · disambiguated record

Sung-Cheon Ko

Also filed as: KO SUNG-CHEON

1 granted patent·7 citations·filing 2004–2004

29Inventor score

Technology areasH10P

Files withVARIAN SEMICONDUCTOR EQUIPMENT1

Top patents by PatentIndex Score

1 record

0158US7878145B2Monitoring plasma ion implantation systems for fault detection and process controlVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Feb 1, 2011·7 cites·17 claims

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Sung-Cheon Ko — Patent Inventor | PatentIndex