Inventor · disambiguated record
Carmen Morales
Also filed as: MORALES CARMEN · MORALES CARMEN L · MORALES CARMEN LAPID
14 granted patents·442 citations·filing 1997–2003
94Inventor score
Files withADVANCED MICRO DEVICES INC14
Top patents by PatentIndex Score
14 records- 0195US7080330B1Concurrent measurement of critical dimension and overlay in semiconductor manufacturingADVANCED MICRO DEVICES INC·Filed 2003·Granted Jul 18, 2006·79 cites·25 claims
- 0295US6594024B1Monitor CMP process using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Jul 15, 2003·103 cites·26 claims
- 0389US6501534B1Automated periodic focus and exposure calibration of a lithography stepperADVANCED MICRO DEVICES INC·Filed 2001·Granted Dec 31, 2002·36 cites·31 claims
- 0487US6063531AFocus monitor structure and method for lithography processADVANCED MICRO DEVICES INC·Filed 1998·Granted May 16, 2000·66 cites·20 claims
- 0581US6597463B1System to determine suitability of sion arc surface for DUV resist patterningADVANCED MICRO DEVICES INC·Filed 2001·Granted Jul 22, 2003·31 cites·26 claims
- 0677US6093973AHard mask for metal patterningADVANCED MICRO DEVICES INC·Filed 1998·Granted Jul 25, 2000·30 cites·7 claims
- 0765US6452161B1Scanning probe microscope having optical fiber spaced from point of hpADVANCED MICRO DEVICES INC·Filed 2000·Granted Sep 17, 2002·13 cites·20 claims
- 0861US6515342B1Method and system for providing inorganic vapor surface treatment for photoresist adhesion promotionADVANCED MICRO DEVICES INC·Filed 2000·Granted Feb 4, 2003·6 cites·9 claims
- 0960US6479817B1Cantilever assembly and scanning tip therefor with associated optical sensorADVANCED MICRO DEVICES INC·Filed 2000·Granted Nov 12, 2002·10 cites·32 claims
- 1060US6066578AMethod and system for providing inorganic vapor surface treatment for photoresist adhesion promotionADVANCED MICRO DEVICES INC·Filed 1997·Granted May 23, 2000·20 cites·9 claims
- 1159US6459945B1System and method for facilitating determining suitable material layer thickness in a semiconductor device fabrication processADVANCED MICRO DEVICES INC·Filed 1999·Granted Oct 1, 2002·22 cites·22 claims
- 1256US6383947B1Anti-reflective coating used in the fabrication of microcircuit structures in 0.18 micron and smaller technologiesADVANCED MICRO DEVICES INC·Filed 2000·Granted May 7, 2002·6 cites·10 claims
- 1354US6165855AAntireflective coating used in the fabrication of microcircuit structures in 0.18 micron and smaller technologiesADVANCED MICRO DEVICES INC·Filed 1998·Granted Dec 26, 2000·13 cites·2 claims
- 1450US6429141B1Method of manufacturing a semiconductor device with improved line width accuracyADVANCED MICRO DEVICES INC·Filed 2000·Granted Aug 6, 2002·7 cites·8 claims
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