Inventor · disambiguated record

Parthiv Patel

Also filed as: PATEL PARTHIV · PATEL PARTHIV S

3 granted patents·52 citations·filing 2000–2017

66Inventor score

Technology areasG05B G01R

Files withCYMER INC2 ECOLIBRIUM ENERGY PRIVATE LTD1

Top patents by PatentIndex Score

3 records

0184US6687562B2Process monitoring system for lithography lasersCYMER INC·Filed 2000·Granted Feb 3, 2004·48 cites·14 claims
0248US7203562B2Process monitoring system for lithography lasersCYMER INC·Filed 2004·Granted Apr 10, 2007·4 cites·51 claims
0324US11366460B2System for monitoring electrical devices and a method thereofECOLIBRIUM ENERGY PRIVATE LTD·Filed 2017·Granted Jun 21, 2022·0 cites·14 claims

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