Inventor · disambiguated record
Matthew Stiles
Also filed as: STILES MATTHEW
6 granted patents·60 citations·filing 2008–2014
83Inventor score
Files withGEORGE GREGORY2BIOTEK INSTR INC1JOHNSON HALE1SUSS MICROTEC INC1SUSS MICROTEC LITHOGRAPHY GMBH1
Top patents by PatentIndex Score
6 records- 0192US8267143B2Apparatus for mechanically debonding temporary bonded semiconductor wafersGEORGE GREGORY·Filed 2010·Granted Sep 18, 2012·23 cites·11 claims
- 0290US8181688B2Apparatus for temporary wafer bonding and debondingJOHNSON HALE·Filed 2010·Granted May 22, 2012·25 cites·16 claims
- 0379US9281229B2Method for thermal-slide debonding of temporary bonded semiconductor wafersSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2014·Granted Mar 8, 2016·3 cites·16 claims
- 0476US8919412B2Apparatus for thermal-slide debonding of temporary bonded semiconductor wafersGEORGE GREGORY·Filed 2010·Granted Dec 30, 2014·3 cites·15 claims
- 0569US7612895B2Apparatus and method for in-situ monitoring of wafer bonding timeSUSS MICROTEC INC·Filed 2008·Granted Nov 3, 2009·4 cites·16 claims
- 0667US9366686B2Microplate stacker for plates with lidsBIOTEK INSTR INC·Filed 2014·Granted Jun 14, 2016·2 cites·7 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →