Inventor · disambiguated record
Vivek Bakshi
Also filed as: BAKSHI VIVEK
3 granted patents·30 citations·filing 2005–2007
69Inventor score
Technology areasG03F
Files withSEMATECH INC3
Top patents by PatentIndex Score
3 records- 0190US7250620B2EUV lithography filterSEMATECH INC·Filed 2005·Granted Jul 31, 2007·20 cites·38 claims
- 0277US7760341B2Systems and methods for in-situ reflectivity degradation monitoring of optical collectors used in extreme ultraviolet (EUV) lithography processesSEMATECH INC·Filed 2007·Granted Jul 20, 2010·5 cites·14 claims
- 0377US7709816B2Systems and methods for monitoring and controlling the operation of extreme ultraviolet (EUV) light sources used in semiconductor fabricationSEMATECH INC·Filed 2007·Granted May 4, 2010·5 cites·19 claims
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