Inventor · disambiguated record
Bernard G. Lindsay
Also filed as: LINDSAY BERNARD · LINDSAY BERNARD G · LINDSAY BERNARD GREGORY
8 granted patents·4 pending applications·179 citations·filing 2007–2012
88Inventor score
Top patents by PatentIndex Score
12 records- 0197US8926850B2Plasma processing with enhanced charge neutralization and process controlVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2012·Granted Jan 6, 2015·59 cites·20 claims
- 0295US9123509B2Techniques for plasma processing a substratePAPASOULIOTIS GEORGE D·Filed 2011·Granted Sep 1, 2015·39 cites·19 claims
- 0394US7586100B2Closed loop control and process optimization in plasma doping processes using a time of flight ion detectorVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Sep 8, 2009·35 cites·25 claims
- 0493US7453059B2Technique for monitoring and controlling a plasma processVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Nov 18, 2008·21 cites·31 claims
- 0585US7675730B2Techniques for detecting wafer charging in a plasma processing systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Mar 9, 2010·8 cites·44 claims
- 0683US8664561B2System and method for selectively controlling ion composition of ion sourcesHADIDI KAMAL·Filed 2009·Granted Mar 4, 2014·7 cites·22 claims
- 0782US8623171B2Plasma processing apparatusGODET LUDOVIC·Filed 2009·Granted Jan 7, 2014·6 cites·9 claims
- 0878US8344318B2Technique for monitoring and controlling a plasma process with an ion mobility spectrometerVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Jan 1, 2013·4 cites·14 claims
- 0956US2009000946A1Plasma processing with enhanced charge neutralization and process controlVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Application pending·0 cites
- 1056US2009001890A1Apparatus for Plasma Processing a Substrate and a Method ThereofVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Application pending·0 cites
- 1155US2009004836A1Plasma doping with enhanced charge neutralizationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Application pending·0 cites
- 1247US2010159120A1Plasma ion process uniformity monitorVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Application pending·0 cites
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