Inventor · disambiguated record
Kazuma Ideguchi
Also filed as: IDEGUCHI KAZUMA
3 granted patents·3 pending applications·0 citations·filing 2021–2024
38Inventor score
Files withEBARA CORP6
Top patents by PatentIndex Score
6 records- 0162US2025163601A1Method for setting forward/backward movement recipe for shielding body, and plating apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 0257US12054841B2Apparatus for plating and method of platingEBARA CORP·Filed 2022·Granted Aug 6, 2024·0 cites·7 claims
- 0355US2025225022A1Method for operating semiconductor manufacturing apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 0452US11866842B2Short circuit detection method in plating apparatus, control method of plating apparatus, and plating apparatusEBARA CORP·Filed 2021·Granted Jan 9, 2024·0 cites·3 claims
- 0547US2024203768A1Semiconductor manufacturing apparatus and method for controlling operation of semiconductor manufacturing apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 0643US11661669B2Substrate processing system, controller and method using test operation without substrateEBARA CORP·Filed 2021·Granted May 30, 2023·0 cites·8 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →