Inventor · disambiguated record
Kaoru Hamaura
Also filed as: HAMAURA KAORU
4 granted patents·1 pending application·5 citations·filing 2014–2018
65Inventor score
Files withEBARA CORP5
Top patents by PatentIndex Score
5 records- 0173US10879086B2Substrate cleaning device, substrate cleaning apparatus, method for manufacturing cleaned substrate and substrate processing apparatusEBARA CORP·Filed 2018·Granted Dec 29, 2020·1 cites·13 claims
- 0270US9855638B2Dressing apparatus, polishing apparatus having the dressing apparatus, and polishing methodEBARA CORP·Filed 2014·Granted Jan 2, 2018·2 cites·21 claims
- 0365US10032655B2Substrate cleaning device, substrate cleaning apparatus, method for manufacturing cleaned substrate and substrate processing apparatusEBARA CORP·Filed 2014·Granted Jul 24, 2018·1 cites·7 claims
- 0459US9919403B2Polishing apparatus, polishing pad positioning method, and polishing padEBARA CORP·Filed 2014·Granted Mar 20, 2018·1 cites·13 claims
- 0547US2015118944A1Polishing apparatus, method for attaching polishing pad, and method for replacing polishing padEBARA CORP·Filed 2014·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →