Inventor · disambiguated record

Erik Matthias Sohmen

Also filed as: SOHMEN ERIK MATTHIAS

1 granted patent·1 pending application·1 citations·filing 2006–2012

15Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1 FELDMANN HEIKO1

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2 records

0162US10114293B2Illumination system and projection objective of a mask inspection apparatusFELDMANN HEIKO·Filed 2012·Granted Oct 30, 2018·1 cites·45 claims
0240US2008073596A1Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2006·Application pending·0 cites

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