Inventor · disambiguated record
Sung Duk Son
Also filed as: SON SUNG DUK
5 granted patents·2 pending applications·4 citations·filing 2012–2025
63Inventor score
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
7 records- 0184US11786946B2Cleaning method and film forming apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Oct 17, 2023·4 cites·16 claims
- 0266US2025346992A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0354US12334380B2Boat transfer method and heat treatment apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jun 17, 2025·0 cites·8 claims
- 0454US2024175125A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0552US12018366B2Substrate processing apparatus and cleaning methodTOKYO ELECTRON LTD·Filed 2021·Granted Jun 25, 2024·0 cites·6 claims
- 0649US8871655B2Method of forming silicon oxycarbonitride filmTOKYO ELECTRON LTD·Filed 2012·Granted Oct 28, 2014·0 cites·10 claims
- 0745US11725281B2Gas introduction structure, thermal processing apparatus and gas supply methodTOKYO ELECTRON LTD·Filed 2020·Granted Aug 15, 2023·0 cites·12 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →