Inventor · disambiguated record
Sanggyun Woo
Also filed as: WOO SANGGYUN
4 granted patents·46 citations·filing 2002–2011
74Inventor score
Top patents by PatentIndex Score
4 records- 0170US6849378B2Photosensitive polymers, resist compositions comprising the same, and methods for forming photoresistive patternsSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Feb 1, 2005·17 cites·39 claims
- 0268US6730458B1Method for forming fine patterns through effective glass transition temperature reductionSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted May 4, 2004·26 cites·21 claims
- 0362US8048595B2Extreme ultraviolet photomask and methods and apparatuses for manufacturing the extreme ultraviolet photomaskSAMSUNG ELECTRONICS CO LTD·Filed 2009·Granted Nov 1, 2011·2 cites·17 claims
- 0456US8216748B2Extreme ultraviolet photomaskJANG ILYONG·Filed 2011·Granted Jul 10, 2012·1 cites·17 claims
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