Inventor · disambiguated record
Jenn-Tarng Lin
Also filed as: LIN JENN-TARNG
14 granted patents·1 pending application·294 citations·filing 1993–1998
93Inventor score
Files withUNITED MICROELECTRONICS CORP14
Top patents by PatentIndex Score
15 records- 0182US5876508AMethod of cleaning slurry remnants after the completion of a chemical-mechanical polish processUNITED MICROELECTRONICS CORP·Filed 1997·Granted Mar 2, 1999·73 cites·6 claims
- 0277US5883014AMethod for treating via sidewalls with hydrogen plasmaUNITED MICROELECTRONICS CORP·Filed 1997·Granted Mar 16, 1999·61 cites·10 claims
- 0365US6048788AMethod of fabricating metal plugUNITED MICROELECTRONICS CORP·Filed 1998·Granted Apr 11, 2000·33 cites·20 claims
- 0457US5716888AStress released VLSI structure by void formationUNITED MICROELECTRONICS CORP·Filed 1996·Granted Feb 10, 1998·25 cites·19 claims
- 0556US5466627AStacked capacitor process using BPSG precipitatesUNITED MICROELECTRONICS CORP·Filed 1994·Granted Nov 14, 1995·20 cites·6 claims
- 0650US6146742ABarrier/glue layer on polysilicon layerUNITED MICROELECTRONICS CORP·Filed 1998·Granted Nov 14, 2000·12 cites·11 claims
- 0746US5950108AMethod of fabricating a conductive plugUNITED MICROELECTRONICS CORP·Filed 1996·Granted Sep 7, 1999·15 cites·10 claims
- 0842US5990004AMethod for forming a tungsten plug and a barrier layer in a contact of high aspect ratioUNITED MICROELECTRONICS CORP·Filed 1998·Granted Nov 23, 1999·10 cites·5 claims
- 0941US5897373AMethod of manufacturing semiconductor components having a titanium nitride layerUNITED MICROELECTRONICS CORP·Filed 1997·Granted Apr 27, 1999·7 cites·12 claims
- 1040US6225222B1Diffusion barrier enhancement for sub-micron aluminum-silicon contactsUNITED MICROELECTRONICS CORP·Filed 1998·Granted May 1, 2001·11 cites·9 claims
- 1140US6030892AMethod of preventing overpolishing in a chemical-mechanical polishing operationUNITED MICROELECTRONICS CORP·Filed 1997·Granted Feb 29, 2000·8 cites·20 claims
- 1237US5883004AMethod of planarization using interlayer dielectricUNITED MICROELECTRONICS CORP·Filed 1997·Granted Mar 16, 1999·8 cites·16 claims
- 1335US6093639AProcess for making contact plugUNITED MICROELECTRONICS CORP·Filed 1996·Granted Jul 25, 2000·7 cites·20 claims
- 1431US5292680AMethod of forming a convex charge coupled deviceUNITED MICROELECTRONICS CORP·Filed 1993·Granted Mar 8, 1994·4 cites·25 claims
- 1527US2001045661A1Composite metallization process for filling high aspect ratio contact holesFiled 1998·Application pending·0 cites
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