Inventor · disambiguated record
Yeong-Rong Chang
Also filed as: CHANG YEONG-RONG
4 granted patents·47 citations·filing 1997–2002
76Inventor score
Files withTAIWAN SEMICONDUCTOR MFG3
Top patents by PatentIndex Score
4 records- 0161US6887793B2Method for plasma etching a wafer after backside grindingTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted May 3, 2005·10 cites·20 claims
- 0258US5783482AMethod to prevent oxide peeling induced by sog etchback on the wafer edgeTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Jul 21, 1998·25 cites·14 claims
- 0357US6740471B1Photoresist adhesion improvement on metal layer after photoresist rework by extra N2O treatmentFiled 2002·Granted May 25, 2004·8 cites·28 claims
- 0433US6057186AMethod for improving the butted contact resistance of an SRAM by double Vcc implantationTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted May 2, 2000·4 cites·8 claims
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