Inventor · disambiguated record
Vietha Nguyen
Also filed as: NGUYEN VIETHA
8 granted patents·18 citations·filing 2015–2018
80Inventor score
Top patents by PatentIndex Score
8 records- 0189US9929099B2Planarized interlayer dielectric with air gap isolationSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Mar 27, 2018·7 cites·15 claims
- 0281US10192782B2Method of manufacturing semiconductor device using a plurality of etch stop layersLEE WOOJIN·Filed 2015·Granted Jan 29, 2019·4 cites·20 claims
- 0379US9972528B2Semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted May 15, 2018·3 cites·20 claims
- 0478US10304734B2Semiconductor devices and methods of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted May 28, 2019·2 cites·20 claims
- 0575US10062609B2Semiconductor devices and methods of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Aug 28, 2018·2 cites·20 claims
- 0650US10186485B2Planarized interlayer dielectric with air gap isolationSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Jan 22, 2019·0 cites·20 claims
- 0743US10916437B2Methods of forming micropatterns and substrate processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Feb 9, 2021·0 cites·19 claims
- 0838US10090381B2Semiconductor device including air-gapSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Oct 2, 2018·0 cites·20 claims
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