Inventor · disambiguated record
Elliott Franke
Also filed as: Franke Elliott
7 granted patents·4 pending applications·18 citations·filing 2016–2022
79Inventor score
Top patents by PatentIndex Score
11 records- 0196US11662584B2Gradient refractive index grating for display leakage reductionMETA PLATFORMS TECH LLC·Filed 2020·Granted May 30, 2023·6 cites·20 claims
- 0294US10976483B2Variable-etch-depth gratingsFACEBOOK TECH LLC·Filed 2020·Granted Apr 13, 2021·3 cites·25 claims
- 0391US11709422B2Gray-tone lithography for precise control of grating etch depthMETA PLATFORMS TECH LLC·Filed 2020·Granted Jul 25, 2023·2 cites·20 claims
- 0486US10319637B2Method for fully self-aligned via formation using a directed self assembly (DSA) processTOKYO ELECTRON LTD·Filed 2017·Granted Jun 11, 2019·5 cites·21 claims
- 0571US10748769B2Methods and systems for patterning of low aspect ratio stacksTOKYO ELECTRON LTD·Filed 2019·Granted Aug 18, 2020·1 cites·20 claims
- 0665US10049892B2Method for processing photoresist materials and structuresTOKYO ELECTRON LTD·Filed 2016·Granted Aug 14, 2018·1 cites·16 claims
- 0754US2023130753A1Gray-tone resists and processesMETA PLATFORMS TECH LLC·Filed 2022·Application pending·0 cites
- 0849US2022317346A1Optical multilayer with barrier layerMETA PLATFORMS TECH LLC·Filed 2021·Application pending·0 cites
- 0947US2022082739A1Techniques for manufacturing variable etch depth gratings using gray-tone lithographyFACEBOOK TECH LLC·Filed 2020·Application pending·0 cites
- 1037US9576812B2Partial etch memorization via flash additionTOKYO ELECTRON LTD·Filed 2016·Granted Feb 21, 2017·0 cites·27 claims
- 1136US2017207103A1Gas phase etch of amorphous and poly-crystalline silicon from high aspect ratio features with high selectivity towards various filmsTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
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