Inventor · disambiguated record
W. Derek Buckley
Also filed as: BUCKLEY W D · BUCKLEY W DEREK
7 granted patents·99 citations·filing 1979–1987
86Inventor score
Files withPERKIN ELMER CORP7
Top patents by PatentIndex Score
7 records- 0176US4329410AProduction of X-ray lithograph masksPERKIN ELMER CORP·Filed 1979·Granted May 11, 1982·25 cites·11 claims
- 0270US4472824AApparatus for effecting alignment and spacing control of a mask and wafer for use in X-ray lithographyPERKIN ELMER CORP·Filed 1982·Granted Sep 18, 1984·21 cites·4 claims
- 0360US4579616AMethod of fabrication of an optically flat membranePERKIN ELMER CORP·Filed 1983·Granted Apr 1, 1986·18 cites·7 claims
- 0458US4831640AIllumination system for x-ray lithographyPERKIN ELMER CORP·Filed 1987·Granted May 16, 1989·13 cites·10 claims
- 0547US4465759AMethod of fabricating a pellicle cover for projection printing systemPERKIN ELMER CORP·Filed 1983·Granted Aug 14, 1984·10 cites·8 claims
- 0643US4523974AMethod of fabricating a pellicle cover for projection printing systemPERKIN ELMER CORP·Filed 1984·Granted Jun 18, 1985·8 cites·15 claims
- 0742US4473777AElectron emitter assemblyPERKIN ELMER CORP·Filed 1982·Granted Sep 25, 1984·4 cites·7 claims
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