Inventor · disambiguated record
Dirk Kaden
Also filed as: KADEN DIRK
2 granted patents·1 pending application·0 citations·filing 2014–2023
25Inventor score
Files withFRAUNHOFER GES FORSCHUNG3
Top patents by PatentIndex Score
3 records- 0163US2023354713A1Ferroelectric material, mems component comprising a ferroelectric material, mems device comprising a first mems component, method of producing a mems component, and method of producing a cmos-compatible mems componentFRAUNHOFER GES FORSCHUNG·Filed 2023·Application pending·0 cites
- 0259US11744158B2Ferroelectric material, MEMS component comprising a ferroelectric material, MEMS device comprising a first MEMS component, method of producing a MEMS component, and method of producing a CMOS-compatible MEMS componentFRAUNHOFER GES FORSCHUNG·Filed 2020·Granted Aug 29, 2023·0 cites·18 claims
- 0334US10095023B2Apparatus comprising a spring and an optical element suspended thereonFRAUNHOFER GES FORSCHUNG·Filed 2014·Granted Oct 9, 2018·0 cites·9 claims
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