Inventor · disambiguated record
Alexander Marinus Arnoldus Huijberts
Also filed as: HUIJBERTS ALEXANDER MARINUS ARNOLDUS
4 granted patents·11 citations·filing 2010–2019
67Inventor score
Top patents by PatentIndex Score
4 records- 0184US9606445B2Lithographic apparatus and method of manufacturing a deviceASML NETHERLANDS BV·Filed 2013·Granted Mar 28, 2017·5 cites·21 claims
- 0283US8970818B2Lithographic apparatus and component with repeating structure having increased thermal accommodation coefficientNIENHUYS HAN-KWANG·Filed 2012·Granted Mar 3, 2015·5 cites·19 claims
- 0363US8625068B2Lithographic apparatus configured to suppress contamination from passing into the projection system and methodNIENHUYS HAN-KWANG·Filed 2010·Granted Jan 7, 2014·1 cites·19 claims
- 0448US11681233B2Gas mixing for fast temperature control of a cooling hoodASML NETHERLANDS BV·Filed 2019·Granted Jun 20, 2023·0 cites·20 claims
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