Inventor · disambiguated record
Toshihiro Aida
Also filed as: AIDA TOSHIHIRO
3 granted patents·4 citations·filing 2012–2014
55Inventor score
Top patents by PatentIndex Score
3 records- 0169US9214364B2Substrate cleaning apparatus and vacuum processing systemDOBASHI KAZUYA·Filed 2012·Granted Dec 15, 2015·3 cites·13 claims
- 0256US9159622B2Dividing method for waferDISCO CORP·Filed 2014·Granted Oct 13, 2015·1 cites·2 claims
- 0348US9533268B2Method and apparatus for supplying mixed gasIWATANI CORP·Filed 2014·Granted Jan 3, 2017·0 cites·8 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →