Inventor · disambiguated record
Patrick David Vogelsang
Also filed as: VOGELSANG PATRICK D · VOGELSANG PATRICK DAVID
5 granted patents·35 citations·filing 2000–2012
77Inventor score
Top patents by PatentIndex Score
5 records- 0173US6875992B2Position measuring device, position measuring system, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 5, 2005·15 cites·20 claims
- 0268US6894261B2Position measuring system for use in lithographic apparatusASML NETHERLANDS BV·Filed 2000·Granted May 17, 2005·12 cites·23 claims
- 0366US8952328B2Charged particle detector system comprising a conversion electrodeSLUIJTERMAN ALBERTUS AEMILLIUS SEYNO·Filed 2012·Granted Feb 10, 2015·3 cites·23 claims
- 0464US8384879B2Optical position sensor, a position sensitive detector, a lithographic apparatus and a method for determining an absolute position of a movable object to be used in a relative position measurement systemASML NETHERLANDS BV·Filed 2009·Granted Feb 26, 2013·1 cites·13 claims
- 0562US7830495B2Lithographic apparatus and position sensorASML NETHERLANDS BV·Filed 2007·Granted Nov 9, 2010·4 cites·9 claims
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